-
7
Machines and machine tools; motors and engines (except for land vehicles); machine coupling and transmission components (except for land vehicles); agricultural implements other than hand-operated; incubators for eggs.
machines for processing wafers; surface treatment machines, especially for wafers, by diffusion at low pressure or vapor deposition chemical vapor deposition (cvd), plasma enhanced chemical vapor deposition (pecvd) and low pressure chemical vapor deposition (lpcvd) or at atmospheric pressure or plasma enhanced; machines and machinery apparatus containing horizontal furnaces for thermal treatment, chemical vapor deposition and manufacturing processes
-
9
Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments; apparatus and instruments for conducting, switching, transforming, accumulating, regulating or controlling electricity; apparatus for recording, transmission or reproduction of sound or images; magnetic data carriers, recording discs; automatic vending machines and mechanisms for coin-operated apparatus; cash registers, calculating machines, data processing equipment and computers; fire-extinguishing apparatus.
computer hardware and recorded software for operating wafer processing machinery and furnaces
-
11
Apparatus for lighting, heating, steam generating, cooking, refrigerating, drying, ventilating, water supply and sanitary purposes.
thermal treatment furnaces for the thermal treatment of wafers in vacuum or at atmospheric pressure; thermal treatment furnaces for the thermal treatment of surfaces and parts, namely, deposition furnaces, thermal treatment and deposition furnaces for thermal treatment and manufacturing processes
-
37
Building construction; repair; installation services
repair, installation and maintenance related to machines and machine tools and their single parts, related to the production and processing of wafers; installation services related to components for plant and process optimization for deposition and thermal treatment furnaces, both atmospheric, subatmospheric and vacuum