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7
Machines and machine tools; motors and engines (except for land vehicles); machine coupling and transmission components (except for land vehicles); agricultural implements other than hand-operated; incubators for eggs.
surface treatment machines for semiconductor surfaces, under vacuum using the cvd method, atmospheric processing or under exposure to plasma, by means of evaporating as well as machines for coating semiconductor surfaces, under vacuum using the cvd method, atmospheric method or under exposure to plasma; machinery for transport, namely, belt conveyors, chain conveyors, string conveyors and transport system using cantilever paddles; plasma- and heat radiation-based surface treatment machines, namely, low pressure chemical vapor deposition (lpcvd) machines, plasma-enhanced chemical vapor deposition (pecvd) machines, atmospheric pressure chemical vapor deposition (apcvd) machines, ma-chines for diffusion, oxidation, annealing; installations and equipment for thermal processing or manufacturing processes, namely, coating furnaces, vacuum soldering machines, chemical vapor deposition (cvd) systems
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9
Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments; apparatus and instruments for conducting, switching, transforming, accumulating, regulating or controlling electricity; apparatus for recording, transmission or reproduction of sound or images; magnetic data carriers, recording discs; automatic vending machines and mechanisms for coin-operated apparatus; cash registers, calculating machines, data processing equipment and computers; fire-extinguishing apparatus.
hardware and software, downloadable and recorded, for operating surface treatment machines, transport machinery, thermal processing machines
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11
Apparatus for lighting, heating, steam generating, cooking, refrigerating, drying, ventilating, water supply and sanitary purposes.
machines for thermal processing, namely, furnaces for the thermal treatment of semiconductors, solar-cells, fi-bers and other substrates and their thermal processing under vacuum; machines for the thermal treatment of sur-faces and objects, namely diffusion furnaces, conveyor furnaces, coating furnaces, annealing systems consist-ing of furnaces, wafer loading, resistive heating systems, radiation-based heating systems; radiation-based rapid heating systems consisting of machines for heat treatment and deposition and plasma-based machines for heat treatment and deposition and the combination thereof; installations and equipment for thermal pro-cessing or manufacturing processes, namely annealing systems consisting of furnaces, wafer loading, resis-tive heating systems, radiation-based heating systems
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37
Building construction; repair; installation services
construction, repair, installation and maintenance services, namely, of machines and machine tools and parts thereof, all for the manufacture and processing of solar cells being single tools or turnkey solutions, semicon-ductors, fibers and raw materials therefor; assembly, namely, installation of semiconductor devices, both at-mospheric and subatmospheric