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7
Machines and machine tools; motors and engines (except for land vehicles); machine coupling and transmission components (except for land vehicles); agricultural implements other than hand-operated; incubators for eggs.
machines for processing semiconductors, solar cells, fibers and other substrates; machines for etching semiconductor surfaces; machines for coating semiconductors surfaces, namely, evaporation machines, chemical vapor deposition (cvd) machines, plasma enhanced machines under vacuum or atmospheric pressure; machinery for atmospheric, subatmospheric and under a predefined gas atmosphere transport, namely, machines for loading substrates into the aforementioned equipment by belt, string and paddle transport, namely, belt conveyors, belt pulleys being parts of machines, and pneumatic transporters; radiation-based rapid heating systems consisting of machines and plasma-based machines and their combination, namely, machines for thermal processing of surfaces and substrates; machines for atomic layer deposition (ald); electric heated installations and equipment for thermal processing or manufacturing processes for semiconductor substrates, namely, coating, oxidation and annealing systems consisting of vacuum soldering machines and chemical vapor deposition (cvd) machines
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9
Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments; apparatus and instruments for conducting, switching, transforming, accumulating, regulating or controlling electricity; apparatus for recording, transmission or reproduction of sound or images; magnetic data carriers, recording discs; automatic vending machines and mechanisms for coin-operated apparatus; cash registers, calculating machines, data processing equipment and computers; fire-extinguishing apparatus.
computer hardware and recorded software for operating machines and machine tools
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11
Apparatus for lighting, heating, steam generating, cooking, refrigerating, drying, ventilating, water supply and sanitary purposes.
firing furnaces; vacuum furnaces; laminating furnaces; [ machines for purification of gas and exhaust gases; ] * machines for thermal, dry and wet-chemical exhaust gas and gas cleaning; * machines for the thermal processing of semiconductors, solar cells, fibers and other substrates and their thermal processing under vacuum, namely, electric heated industrial furnaces; machines for the thermal treatment of surfaces and objects, namely, diffusion furnaces, conveyor furnaces, coating furnaces, annealing systems consisting of gas or electric heated decomposition unit in the nature of gas and electric decomposition furnaces; systems for the treatment and purification of gases and waste gases, namely, emission control systems, comprised primarily of thermal decomposition unit in the nature of thermal decomposition furnaces; installations and equipment for thermal processing or manufacturing processes, namely, diffusion furnaces, conveyor furnaces and firing furnaces
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37
Building construction; repair; installation services
construction, repair, installation and maintenance services, namely, of machines and machine tools and parts thereof, all for the manufacture and processing of solar cells, namely, turnkey solutions, semiconductors, fibers and raw materials therefor; assembly, namely, installation of atmospheric and subatmospheric machines; repair and maintenance of atmospheric and subatmospheric machines